Title :
Photocathode based on deuterated diamond like carbon films prepared by reactive magnetron sputtering and PECVD technology
Author :
Huran, Jozef ; Balalykin, Nikolay I. ; Kadlecikova, M. ; Zat´ko, B. ; Feschenko, Alexandr A. ; Kobzev, Alexander P. ; Vanco, L. ; Nozdrin, Mikhail A. ; Kleinova, Angela ; Kovacova, E.
Author_Institution :
Inst. of Electr. Eng., Bratislava, Slovakia
Abstract :
The influence of deuterated diamond like carbon films technology and properties on quantum efficiency of prepared photocathode has been investigated. Deuterated diamond like carbon films were deposited on silicon substrate and stainless steel mesh by PECVD from gas mixture CH4 and D2 and reactive magnetron sputtering using carbon target and gas mixture Ar and D2. The concentration of elements in films was determined by RBS and ERD. Chemical compositions were analyzed by FT-IR. Raman spectroscopy at visible excitation wavelength was used for I(D)/I(G) ratio determination. The quantum efficiency was calculated from the measured laser energy and the measured cathode charge.
Keywords :
Fourier transform spectra; Raman spectra; Rutherford backscattering; diamond-like carbon; infrared spectra; photocathodes; plasma CVD; spectrochemical analysis; sputter deposition; thin film devices; C; ERD; FTIR spectroscopy; PECVD technology; RBS; Raman spectroscopy; Si; carbon target; cathode charge; chemical compositions; deuterated diamond like carbon films technology; gas mixture; laser energy; photocathode; quantum efficiency; reactive magnetron sputtering; silicon substrate; stainless steel mesh; visible excitation wavelength; Cathodes; Diamond-like carbon; Magnetic films; Measurement by laser beam; Silicon; Sputtering;
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2012 Ninth International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4673-1197-7
DOI :
10.1109/ASDAM.2012.6418517
