Title :
Acoustic wave sensor system design consideration
Author :
Laposa, A. ; Majer, M. ; Husak, M.
Author_Institution :
Dept. of Microelectron., Czech Tech. Univ. in Prague, Prague, Czech Republic
Abstract :
In this paper, we present the development and considerations of simple acoustic wave chemical sensors. These sensors can be used for identifying environmental contaminants in large applications scale. Various finite element models of a Acoustic Wave sensors are developed using CoventorWare and 3D analysis is performed on the devices to study the acoustic wave propagation and characterize the device. The effects of the various interdigital transducers (IDT) design; intermediate layer on the propagation characteristics is also investigated.
Keywords :
acoustic transducers; acoustic wave propagation; chemical sensors; finite element analysis; 3D analysis; CoventorWare; IDT design; acoustic wave chemical sensors; acoustic wave propagation; environmental contaminants; finite element models; interdigital transducer design; Chemicals; Gas detectors; Oscillators; Piezoelectric transducers; Surface acoustic waves;
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2012 Ninth International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4673-1197-7
DOI :
10.1109/ASDAM.2012.6418534
