Fast Positioning and Impact Minimizing of MEMS Devices by Suppression Motion-Induced Vibration by Command Shaping Method

This work presents a command-shaping based scheme for both fast positioning and reducing contact impact of MEMS devices by suppression motion-induced vibrations. The scheme was developed by applying energy conservation, force equilibrium, and elliptical integrals. Simulink simulations indicated that both of the impact force and settling time can be effectively reduced. Specimen fabricated using Su-8 and a test bed was designed to further demonstrate the performance of the proposed scheme and the test results indicated that the proposed approach can effectively enhance the dynamic performance of MEMS devices such as RF switches.