Demonstration of Secondary Electron Detection using Monolithic Multi-Channel Electron Detector

A multi-channel PIN-diode-based detector is developed. The electrodes, in a linear array with pitch of 250 mum, detect the signals generated by the secondary electrons incident into the other side of the detector. Each detection area has a throughhole, which allows the primary beamlet to pass through. The characterizations are performed by using a primary beamlet of a conventional SEM instead of secondary electrons. The experimental results is consistent with the stimulated prediction.