Design of a compliant XY stage with embedded force sensor for micro-scale positioning

This paper presents the development of a micro-scale positioning device based on two degrees of freedom (DOF) plane compliant parallel mechanism, which is featured by piezo-driven actuators and flexure joints, integrated force/torque sensor that capable of delivering 2-DOF motions with high precision and providing real-time force/torque or position information for feedback control. With optimization design, the proper parameters of the proposed structure and flexure joints are chosen. The stage possesses high precision and resolution, configurational simplicity and compactness. And the embedded sensor possesses the advantages such as, isotropic and high sensitivity.