Title :
Fabrication of Nonvolatile Nano-Floating Gate Memory with Self-Assembled Metal-Oxide Nano-Particles Embedded in Polyimide
Author :
Kim, Seon Pil ; Lee, Tae Hee ; Lee, Dong Uk ; Kim, Eun Kyu ; Koo, Hyun-Mo ; Cho, Won-Ju ; Kim, Young-Ho
Author_Institution :
Hanyang Univ., Seoul
Abstract :
In this article, the nonvolatile nano-floating gate memory (NFGM) device was fabricated with self-assembled metal-oxide nano-particles embedded in a polyimide gate insulator and characterized.
Keywords :
indium compounds; nanoelectronics; nanoparticles; polymer insulators; random-access storage; self-assembly; device fabrication; nonvolatile nanofloating gate memory device; polyimide gate insulator; self-assembled metal-oxide nanoparticles; Etching; Fabrication; Inorganic materials; Insulation; Metal-insulator structures; Nanoscale devices; Nonvolatile memory; Polyimides; Self-assembly; Silicon on insulator technology;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456140
