DocumentCode
3048463
Title
High magnetoresistance of InSb with an embedded Au core
Author
Suh, Jooyoung ; Kim, Won Young ; Chang, Joonyeon ; Kim, Eun Kyu
Author_Institution
Korea Inst. of Sci. & Technol., Seoul
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
140
Lastpage
141
Abstract
This study explores the possible scalability of the device by investigating the magnetoresistance (MR) of small sized devices around 100 mum in diameter. Polycrystalline InSb film (1 mum thick) is thermally evaporated onto the insulating Si substrate. InSb van der Pauw disk (100 mum size) was fabricated by standard microfabrication techniques. Subsequently, the core and contact pads are covered by a Ti/Au, with Au being the dominant component. The MR of prepared devices with different embedded Au size is systematically investigated to find out the optimum embedded Au size and the origin of geometrical MR.
Keywords
III-V semiconductors; gold; indium compounds; magnetic semiconductors; magnetic thin film devices; magnetoresistance; magnetoresistive devices; semiconductor devices; InSb-Au; Si; contact pads; embedded Au core; insulating Si substrate; magnetoresistance; polycrystalline InSb film; size 1 mum; size 100 mum; standard microfabrication; thermal evaporation; van der Pauw disk; Filling; Gold; Indium; Magnetic cores; Magnetic fields; Magnetoresistance; Optical microscopy; Optical sensors; Semiconductor devices; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456143
Filename
4456143
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