Title :
High magnetoresistance of InSb with an embedded Au core
Author :
Suh, Jooyoung ; Kim, Won Young ; Chang, Joonyeon ; Kim, Eun Kyu
Author_Institution :
Korea Inst. of Sci. & Technol., Seoul
Abstract :
This study explores the possible scalability of the device by investigating the magnetoresistance (MR) of small sized devices around 100 mum in diameter. Polycrystalline InSb film (1 mum thick) is thermally evaporated onto the insulating Si substrate. InSb van der Pauw disk (100 mum size) was fabricated by standard microfabrication techniques. Subsequently, the core and contact pads are covered by a Ti/Au, with Au being the dominant component. The MR of prepared devices with different embedded Au size is systematically investigated to find out the optimum embedded Au size and the origin of geometrical MR.
Keywords :
III-V semiconductors; gold; indium compounds; magnetic semiconductors; magnetic thin film devices; magnetoresistance; magnetoresistive devices; semiconductor devices; InSb-Au; Si; contact pads; embedded Au core; insulating Si substrate; magnetoresistance; polycrystalline InSb film; size 1 mum; size 100 mum; standard microfabrication; thermal evaporation; van der Pauw disk; Filling; Gold; Indium; Magnetic cores; Magnetic fields; Magnetoresistance; Optical microscopy; Optical sensors; Semiconductor devices; Temperature;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456143