Title :
Surface modification of a diamond-like carbon thin film using hyperthermal fluorine beams
Author :
Yamada, N. ; Kanda, K. ; Yokota, K. ; Tagawa, M. ; Niibe, M. ; Haruyama, Y. ; Matsui, S.
Author_Institution :
Univ. of Hyogo, Ako
Abstract :
Surface modification of a diamond-like carbon (DLC) thin film was performed using hyperthermal fluorine beams. After the irradiation of fluorine beam, the contact angle of a water drop against the DLC surface increased from 73deg to 87deg. The formation of C-F bonding was confirmed from the carbon K-edge near-edge X-ray absorption fine structure (NEXAFS) study on the DLC surface after irradiation of fluorine beam.
Keywords :
EXAFS; XANES; bonds (chemical); contact angle; diamond-like carbon; ion beam effects; surface treatment; thin films; C; C-F bonding; NEXAFS; carbon K-edge near-edge X-ray absorption fine structure; contact angle; diamond-like carbon thin film; hyperthermal fluorine beams; surface modification; water drop; Atomic beams; Atomic layer deposition; Bonding; Chemical vapor deposition; Diamond-like carbon; Electromagnetic wave absorption; Friction; Hyperthermia; Laser beams; Transistors;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456156
