DocumentCode
3048765
Title
TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)-metal precursors
Author
Takeguchi, M. ; Shimojo, M. ; Tanaka, M. ; Mitsuishi, K. ; Furuya, K.
Author_Institution
Nat. Inst. for Mater. Sci., Tsukuba
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
176
Lastpage
177
Abstract
In this paper, nanowires were fabricated by electron beam induced deposition using tetrakis(trifluorophosphite)-metal precursors. The microstructure and composition of the nanostructure were characterized by transmission electron microscopy (TEM).
Keywords
electron beam deposition; nanotechnology; nanowires; transmission electron microscopy; EBID; TEM; composition; electron beam induced deposition; microstructure; nanostructures; transmission electron microscopy; Chemical elements; Conductivity; Electron beams; Materials science and technology; Microstructure; Nanostructures; Nanowires; Platinum; Quantum dots; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456161
Filename
4456161
Link To Document