Title :
TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)-metal precursors
Author :
Takeguchi, M. ; Shimojo, M. ; Tanaka, M. ; Mitsuishi, K. ; Furuya, K.
Author_Institution :
Nat. Inst. for Mater. Sci., Tsukuba
Abstract :
In this paper, nanowires were fabricated by electron beam induced deposition using tetrakis(trifluorophosphite)-metal precursors. The microstructure and composition of the nanostructure were characterized by transmission electron microscopy (TEM).
Keywords :
electron beam deposition; nanotechnology; nanowires; transmission electron microscopy; EBID; TEM; composition; electron beam induced deposition; microstructure; nanostructures; transmission electron microscopy; Chemical elements; Conductivity; Electron beams; Materials science and technology; Microstructure; Nanostructures; Nanowires; Platinum; Quantum dots; Scanning electron microscopy;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456161
