DocumentCode
3049713
Title
Fundamental investigation on transparent replicated mold using an organic-inorganic hybrid material
Author
Washiya, R. ; Ando, Takehiro ; Ohkubo, H. ; Kitano, N. ; Shiota, T. ; Miyauchi, A.
Author_Institution
Hitachi Ltd., Hitachi
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
292
Lastpage
293
Abstract
This paper investigates a replication process using the organic-inorganic hybrid material. The condition of heat treatment was determined on the basis of the hardness and transmission measurements. 100 repeated imprints were demonstrated using the replicated mold and achieved good fidelity.
Keywords
moulding; organic-inorganic hybrid materials; replica techniques; soft lithography; fidelity; hardness; heat treatment; organic-inorganic hybrid material; replication process; transparent mold; Communication cables; Costs; Glass; Heat treatment; Laboratories; Nanostructures; Organic inorganic hybrid materials; Polymers; Substrates; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456219
Filename
4456219
Link To Document