• DocumentCode
    3049767
  • Title

    Investigation on Laser Assisted Direct Imprinting Parameters for Fabricating Micro- and Nano- Structures

  • Author

    Hsiao, Fei-Bin ; Lee, Yung-Chun ; Chuang, Cheng-Hsin ; Ruan, Jun-Yi

  • Author_Institution
    Nat. Cheng Kung Univ., Tainan
  • fYear
    2007
  • fDate
    5-8 Nov. 2007
  • Firstpage
    298
  • Lastpage
    299
  • Abstract
    The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive molds as well.
  • Keywords
    laser materials processing; nanolithography; soft lithography; Si; laser assisted direct imprinting parameters; microstructures; nanostructures; quartz nano-negative molds; Chemical lasers; Chromium; Etching; Laser modes; Laser theory; Lithography; Nanolithography; Nanostructures; Nanotechnology; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology, 2007 Digest of papers
  • Conference_Location
    Kyoto
  • Print_ISBN
    978-4-9902472-4-9
  • Type

    conf

  • DOI
    10.1109/IMNC.2007.4456222
  • Filename
    4456222
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3049767