Title :
Investigation on Laser Assisted Direct Imprinting Parameters for Fabricating Micro- and Nano- Structures
Author :
Hsiao, Fei-Bin ; Lee, Yung-Chun ; Chuang, Cheng-Hsin ; Ruan, Jun-Yi
Author_Institution :
Nat. Cheng Kung Univ., Tainan
Abstract :
The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive molds as well.
Keywords :
laser materials processing; nanolithography; soft lithography; Si; laser assisted direct imprinting parameters; microstructures; nanostructures; quartz nano-negative molds; Chemical lasers; Chromium; Etching; Laser modes; Laser theory; Lithography; Nanolithography; Nanostructures; Nanotechnology; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456222
