Title :
Fabrication of ZnO micro-fluidic channels by ZnO sol-gel/PMMA bilayer structure
Author :
Lee, J.C. ; Leu, I.C. ; Hon, M.H.
Author_Institution :
Nat. Cheng Rung Univ., Tainan
Abstract :
In this study, we describe simple fabrication methods to fabricate ZnO micro-fluidic channels by using a ZnO sol-gel/polymethymethacrylate (PMMA) bilayer structure. Two types of ZnO micro-fluidic channels were then created successfully after a hot-embossing step and the subsequent removal of PMMA by annealing.
Keywords :
II-VI semiconductors; annealing; embossing; microfluidics; polymers; sol-gel processing; wide band gap semiconductors; zinc compounds; ZnO; annealing; hot embossing; microfluidic channels; polymethymethacrylate; sol-gel/PMMA bilayer structure; Annealing; Fabrication; Heat treatment; Materials science and technology; Photonic band gap; Semiconductor films; Shape; Silicon; Substrates; Zinc oxide;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456235
