Integration of Ag/AgCl reference electrode with MOSFET-type biosensor

Author

Choi, Ho-Jin ; Shin, Jang-Kyoo ; Choi, Pyung ; Lyu, Hong-Kun ; Sawada, Kazuaki ; Ishida, Makoto

Author_Institution

Kyungpook Nat. Univ., Daegu

fYear

2007

fDate

5-8 Nov. 2007

Firstpage

352

Lastpage

353

Abstract

In this study, a CMOS process-compatible MOSFET-type biosensor with a built-in Ag/AgCI thin film reference electrode have been fabricated on the same chip. Au was used as the gate metal of the MOSFET-type biosensor in order to immobilize biomolecules. Electrical characteristics of the MOSFET-type biosensor is quite stable and similar to the characteristics of the biosensor with the conventional Ag/AgCI glass electrode. Therefore, it is concluded that the Ag/AgCI thin film reference electrode might replace the voluminous Ag/AgCI glass reference electrode for realization of miniature biosensors and micro total analysis systems.

Keywords

MOSFET; biosensors; electrodes; gold; metallic thin films; molecular biophysics; silver; silver compounds; Ag-AgCl-Au; CMOS process; MOSFET-type biosensor; biomolecule immobilization; built-in thin film reference electrode; electrical properties; gate metal; Atom optics; Atomic measurements; Bioinformatics; Biosensors; Electrodes; Genomics; Glass; Gold; Molecular biophysics; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology, 2007 Digest of papers

Conference_Location

Kyoto

Print_ISBN

978-4-9902472-4-9

Type

conf

DOI

10.1109/IMNC.2007.4456249

Filename

4456249