DocumentCode
3050364
Title
Helical Patterning onto Fine Pipes and Fabrication of Long-span Micro-coils
Author
Katayama, Masahiro ; Horiuchi, Toshiyuki
Author_Institution
Tokyo Denki Univ., Tokyo
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
372
Lastpage
373
Abstract
In this research, 3-dimensional laser scan patterning onto extremely fine pipes is investigated and minute micro-coils are fabricated by etching the helically patterned fine pipes.
Keywords
coils; copper; etching; laser materials processing; micromechanical devices; photolithography; pipes; 3D laser scan patterning; Cu; etching; fine copper pipes; helical patterning; microcoils; optical lithography; Coatings; Coils; Copper; Etching; Laser beams; Lenses; Lithography; Optical device fabrication; Resists; Temperature control;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456259
Filename
4456259
Link To Document