Title :
Low Frequency Noise Measurement and Analysis of Capacitive Micro-Accelerometers: Temperature Effect
Author :
Mohd-Yasin, Faisal ; Nagel, D.J. ; Ong, D.S. ; Korman, C.E. ; Chuah, H.T.
Author_Institution :
Multimedia Univ., Cyberjaya
Abstract :
In this work, a noise measurement of capacitive micro-accelerometers incorporating temperature effect is presented. In the setup, a hot plate is used to heat the device up to temperatures in the 75 degree C range. A thermo couple attached to the enclosure is used to assess its temperature. The data show that the noise power increases at high temperature, but not as significant as predicted by the theory.
Keywords :
accelerometers; capacitive sensors; electric noise measurement; microsensors; MEMS; accelerometers; capacitive microaccelerometers; low frequency noise measurement; temperature 75 degC; temperature effect; thermocouple; Acceleration; Accelerometers; Circuit noise; Frequency measurement; Low-frequency noise; Micromechanical devices; Noise figure; Noise measurement; Sensor phenomena and characterization; Temperature; acceleration-dependent; accelerometers; noise; temperature-dependence;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456261
