Fabrication of Bistable Prestressed Curved-Beam

Bistable curved-beams are micro electro mechanical systems (MEMS) that can switch over two stable bending states and maintain these states without consuming power. One of the most attractive applications of these structures is memory devices. A prestressed curved-beam of single crystal Si is fabricated through the sequences of the standard CMOS process using SOI. The theoretical analysis procedure for the bistable operation is established. The miniaturized bistable curved-beam is applied to memory devices.