DocumentCode
3050790
Title
Ultraviolet Nanoimprint Lithography Applicable to Thin-Film Transistor Liquid-Crystal Display
Author
Lee, Eung-Sug ; Jeong, Jun-Ho ; Kim, Ki-Don ; Choi, Dae-Geun ; Choi, Jun-Hyuk ; Lee, Dong-II ; Altun, Ali Ozhan ; Lee, Soon-Won
Author_Institution
Korea Inst. of Machinery & Mater., Daejeon
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
422
Lastpage
423
Abstract
In this study, an ultraviolet nanoimprint lithography (UV-NIL) process using a quartz stamp in a low vacuum environment is presented. Experimental results demonstrate the potential of the proposed approach as a low-cost lithographic process applicable to flat panel displays.
Keywords
liquid crystal displays; nanolithography; soft lithography; thin film transistors; ultraviolet lithography; flat panel displays; quartz stamp; thin-film transistor liquid-crystal display; ultraviolet nanoimprint lithography process; vacuum environment; Dry etching; Glass; Liquid crystal displays; Nanolithography; Optical films; Optical microscopy; Rubber; Steel; Substrates; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456284
Filename
4456284
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