DocumentCode
3050886
Title
High field phenomena in poly-p-xylylene thin films-oxidation effects
Author
Mizutani, T. ; Mori, T. ; Matsui, T.
Author_Institution
Nagoya Univ., Japan
fYear
1990
fDate
28-31 Oct 1990
Firstpage
237
Lastpage
242
Abstract
High-field currents in PPX thin films were suppressed by the introduction of an oxidized layer. The closer to the anode the oxidized layer was located, the more effectively it suppressed the high-field current. The oxidized layer also increased the dielectric strength of PPX thin film. These results can be explained in terms of carrier scattering due to C =0 in the oxidized layer and the suppression of hole injection from the anode due to the oxidized layer
Keywords
dielectric thin films; high field effects; insulating thin films; oxidation; polymer films; PPX thin films; carrier scattering; dielectric strength; high field phenomena; high-field current suppression; oxidized layer; poly-p-xylylene; suppression of hole injection; Artificial intelligence; Breakdown voltage; Electric breakdown; Electrodes; Electromagnetic wave absorption; Ionization; Oxidation; Pulse measurements; Temperature; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Insulation and Dielectric Phenomena, 1990. Annual Report., Conference on
Conference_Location
Pocono Manor, PA
Type
conf
DOI
10.1109/CEIDP.1990.201348
Filename
201348
Link To Document