• DocumentCode
    3050886
  • Title

    High field phenomena in poly-p-xylylene thin films-oxidation effects

  • Author

    Mizutani, T. ; Mori, T. ; Matsui, T.

  • Author_Institution
    Nagoya Univ., Japan
  • fYear
    1990
  • fDate
    28-31 Oct 1990
  • Firstpage
    237
  • Lastpage
    242
  • Abstract
    High-field currents in PPX thin films were suppressed by the introduction of an oxidized layer. The closer to the anode the oxidized layer was located, the more effectively it suppressed the high-field current. The oxidized layer also increased the dielectric strength of PPX thin film. These results can be explained in terms of carrier scattering due to C=0 in the oxidized layer and the suppression of hole injection from the anode due to the oxidized layer
  • Keywords
    dielectric thin films; high field effects; insulating thin films; oxidation; polymer films; PPX thin films; carrier scattering; dielectric strength; high field phenomena; high-field current suppression; oxidized layer; poly-p-xylylene; suppression of hole injection; Artificial intelligence; Breakdown voltage; Electric breakdown; Electrodes; Electromagnetic wave absorption; Ionization; Oxidation; Pulse measurements; Temperature; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Insulation and Dielectric Phenomena, 1990. Annual Report., Conference on
  • Conference_Location
    Pocono Manor, PA
  • Type

    conf

  • DOI
    10.1109/CEIDP.1990.201348
  • Filename
    201348