Title :
Investigation of Dual-Focal-Points Optical System with Bright-Field Illumination and Image Processing for UV Nanoimprint Alignment
Author :
Suehira, Nobuhito ; Terasaki, Atsunori ; Okushima, Shingo ; Seki, Junichi ; Ono, Haruhito
Author_Institution :
Canon Inc., Atsugi
Abstract :
In this study, a new wide-gap alignment technique was developed for the investigation of dual-focal-points optical system with bright field illumination and image processing for UV nanoimprint.
Keywords :
image processing; nanolithography; ultraviolet lithography; UV nanoimprint; bright-field illumination; dual-focal-points optical system; image processing; wide-gap alignment technique; Charge coupled devices; Charge-coupled image sensors; Filling; Histograms; Image processing; Lenses; Light sources; Lighting; Position measurement; Resins;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456293
