DocumentCode
3050994
Title
Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint
Author
Onishi, Y. ; Takagi, Hiroyuki ; Takahashi, Masaharu ; Maeda, Ryutaro ; Tanabe, Takasumi ; Iriye, Y.
Author_Institution
Mizuho Info. Res. Inst. Inc., Tokyo
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
442
Lastpage
443
Abstract
Numerical and experimental analyses of an intermittent line-and-space pattern in thermal nanoimprint lithography were carried out. Both numerical and experimental results showed same tendencies and explained characteristic phenomena which never appear in continuous line-and-space patterning cases. We believe that numerical simulations with more accurate material properties and finer finite element meshes have possibilities to agree with experiments better enough for practical use.
Keywords
mesh generation; nanolithography; nanopatterning; finite element meshes; line-and-space patterning; thermal nanoimprint lithography; Analytical models; Boundary conditions; Fabrication; Finite element methods; Material properties; Material storage; Numerical simulation; Pattern analysis; Pressing; Resins;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456294
Filename
4456294
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