• DocumentCode
    3051450
  • Title

    Fabrication of bottom-up gas sensors based on individual SnO2 nanowires and suspended microhotplates

  • Author

    Barth, Stephan ; Hernandez-Ramirez, F. ; Prades, J.D. ; Jimenez-Diaz, R. ; Casals, O. ; Tarancon, A. ; Juli, M.A. ; Mathur, S. ; Helwig, Andreas ; Spannhake, J. ; Miiller, G.

  • Author_Institution
    Barcelona Univ., Barcelona
  • fYear
    2007
  • fDate
    5-8 Nov. 2007
  • Firstpage
    490
  • Lastpage
    491
  • Abstract
    In this work, bottom-up devices based on individual monocrystalline SnO2 nanowires (NWs) were fabricated using FIB nanolithography on top of suspended microhotplates, with integrated heater and interdigitated microelectrodes. The electrical characterisation of such devices in the presence of different gases show that devices with improved gas sensing properties can be fabricated.
  • Keywords
    focused ion beam technology; gas sensors; nanoelectronics; nanolithography; nanowires; semiconductor materials; tin compounds; FIB nanolithography; SnO2; bottom-up gas sensors; integrated heater; interdigitated microelectrodes; nanowires; suspended microhotplates; Chemicals; Circuit testing; Contacts; Fabrication; Gas detectors; Microelectrodes; Nanolithography; Nanowires; Platinum; Thin film sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology, 2007 Digest of papers
  • Conference_Location
    Kyoto
  • Print_ISBN
    978-4-9902472-4-9
  • Type

    conf

  • DOI
    10.1109/IMNC.2007.4456318
  • Filename
    4456318
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3051450