Title :
Silicon Fishbone-Shaped Resonant-Frequency-Tunable MEMS Resonator
Author :
Makita, Sho ; Tanigawa, Hiroshi ; Suzuki, Kenichiro
Author_Institution :
Ritsumeikan Univ, Shiga
Abstract :
In this study, a silicon fishbone-shaped resonant-frequency-tunable MEMS resonator is designed and fabricated. The resonator can vibrate in larger amplitude than conventional doubly-fixed-beam resonator and resonant frequency characteristic is tunable by selectively choosing exciting electrodes. This new resonator should be useful for wider multi-band frequency applications, for example, reference oscillator of cellular phones and multi-band tunable filters.
Keywords :
elemental semiconductors; micromechanical resonators; silicon; Si; multiband frequency applications; silicon fishbone-shaped resonant-frequency-tunable MEMS resonator; Electrodes; Etching; Glass; Micromechanical devices; Resonance; Resonant frequency; Silicon; Tunable circuits and devices; Vibration measurement; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456323
