Fabrication of the functional 3-D micromesh structures coated with TiO2 particles and biocatalyst

Author

Keino, Satoshi ; Matsumura, Hirokazu ; Ishioka, Masao ; Sato, Hironobu ; Shoji, Shuichi

Author_Institution

Waseda Univ., Tokyo

fYear

2007

fDate

5-8 Nov. 2007

Firstpage

520

Lastpage

521

Abstract

This paper presents the fabrication method of the functional 3-D micromesh structures coated with TiO₂ particles and biocatalyst for high efficient microreactors. The micromesh structures are useful as a micro reaction space because of their large surface area. The TiO₂-fixed SU-8 micromesh structures were formed by coating the SU-8/TiO₂ mixture on the surface of the SU-8 micromeshes. The biocatalyst-immobilized micromeshes were also formed by coating the biocatalyst/polymer mixture using UV irradiation through the concentric circle patterns.

Keywords

catalysts; enzymes; microreactors; molecular biophysics; polymer films; spin coating; titanium compounds; ultraviolet radiation effects; SU-8 micromesh; TiO₂; UV irradiation; biocatalyst-immobilized micromeshes; biocatalyst-polymer mixture coating; concentric circle patterns; enzyme; functional 3-D micromesh structures; microreaction space; microreactors; spin coating; titanium dioxide particles; Actuators; Biochemistry; Biosensors; Chromium; Coatings; Fabrication; Glass; Microfluidics; Polymer films; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology, 2007 Digest of papers

Conference_Location

Kyoto

Print_ISBN

978-4-9902472-4-9

Type

conf

DOI

10.1109/IMNC.2007.4456333

Filename

4456333