DocumentCode
305244
Title
NSOM study of surface plasmon scattering by in-situ created individual defects
Author
Smolyaninov, Lgor I. ; Mazzoni, David L. ; Davis, Christopher C.
Author_Institution
Dept. of Electr. Eng., Maryland Univ., College Park, MD, USA
Volume
1
fYear
1996
fDate
18-21 Nov. 1996
Firstpage
180
Abstract
We have developed a direct-write lithography technique that allows us to create submicron size patterns on virtually any opaque surface. This technique implements a standard near-field scanning optical/shear force microscope described. The use of uncoated UV grade tapered fiber and nanosecond pulsed 248 nm excimer laser light allows us to deliver an estimated 200 GW/m/sup 2/ UV light power into a tip-sample region smaller than 200 x 200 nm/sup 2/ during a single laser pulse. This power is sufficient for local surface ablation of gold or silver and local melting of silicon without melting of the transparent UV fiber tip. The topographic changes caused by UV irradiation are immediately recorded by the shear force microscope. The developed technique is to some extent similar to STM lithography but is not restricted by the conductance of the sample surface. We have implemented our lithography technique to study the scattering of surface plasmons by single surface defects and to create some simple two-dimensional optical elements for SPs.
Keywords
gold; laser ablation; metallic thin films; optical elements; optical fabrication; optical fibres; optical microscopy; photolithography; silver; surface plasmons; surface structure; 248 nm; Ag; Au; NSOM study; Si; UV light power; direct-write lithography technique; in-situ created individual defects; local melting; local surface ablation; nanosecond pulsed 248 nm excimer laser light; opaque surface; simple two-dimensional optical elements; single laser pulse; single surface defects; standard near-field scanning optical/shear force microscope; submicron size patterns; surface plasmon scattering; tip-sample region; topographic changes; transparent UV fiber tip; uncoated UV grade tapered fiber; Fiber lasers; Laser ablation; Light scattering; Lithography; Optical microscopy; Optical pulses; Optical scattering; Plasmons; Power lasers; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1996. LEOS 96., IEEE
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-3160-5
Type
conf
DOI
10.1109/LEOS.1996.565184
Filename
565184
Link To Document