Fabrication quality of glass microfluidic chips

Microfluidic chips, which are of excellent properties and for biochemical testing, are researched and manufactured in this paper. The biochemical reactor cells and microchannels in glass substrates of microfluidic chips are fabricated by processes of doping, photomask and wet etching etc, surface morphology and surface roughness are measured by the stylus profiler; at the same time sample-input through-holes in glass covers of microfluidic chips are fabricated by laser machining and mechanical drilling, surface morphology and surface roughness are also measured by the metallurgical microscope. Experimental results show at last that sample-input is done smoothly through cover holes of microfluidic chips; two side surfaces of substrate channels, which are satisfied to the predesigned shapes and smoothness, are smooth and assure fluid sample-input from reactor cells to channels successfully, the manufactured microfluidic chips are of prospected properties in practical use.