DocumentCode
3052742
Title
Doping and segregation effects in AlGaN systems
Author
Boguslawski, P. ; Bernholc, J.
Author_Institution
Inst. Fizyki PAN, Acad. of Sci., Warsaw, Poland
fYear
1998
fDate
1998
Firstpage
233
Lastpage
238
Abstract
Doping properties of substitutional C, Si, Ge, Be, and Se impurities in wurtzite GaN and AlN are studied by quantum molecular dynamics. We investigate effects that potentially quench doping efficiency, namely the self-compensation and the compensation by native defects. We also predict a strong interfacial segregation of SeN , CN, and nitrogen vacancies at the AlN/GaN heterointerface towards the GaN layer
Keywords
III-V semiconductors; aluminium compounds; beryllium; carbon; gallium compounds; germanium; molecular dynamics method; selenium; semiconductor doping; silicon; surface segregation; vacancies (crystal); AlN:Be; AlN:C; AlN:Ge; AlN:Se; AlN:Si; GaN:Be; GaN:C; GaN:Ge; GaN:Se; GaN:Si; doping efficiency; quantum molecular dynamics; segregation; self-compensation; substitutional impurities; vacancies; wurtzite; Aluminum gallium nitride; Capacitive sensors; Doping; Gallium nitride; Impurities; Light emitting diodes; Nitrogen; Optical materials; Photonic band gap; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconducting and Insulating Materials, 1998. (SIMC-X) Proceedings of the 10th Conference on
Conference_Location
Berkeley, CA
Print_ISBN
0-7803-4354-9
Type
conf
DOI
10.1109/SIM.1998.785114
Filename
785114
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