• DocumentCode
    3053224
  • Title

    Modeling bias temperature instability during stress and recovery

  • Author

    Grasser, Tibor ; Goes, Wolfgang ; Kaczer, Ben

  • Author_Institution
    Christian Doppler Lab. for TCAD, Tech. Univ. Wien, Vienna
  • fYear
    2008
  • fDate
    9-11 Sept. 2008
  • Firstpage
    65
  • Lastpage
    68
  • Abstract
    Bias temperature instability has attracted a lot of attention as a dominant degradation mechanism in modern MOS transistors. Despite considerable effort, the exact physics behind this mechanisms are still controversial. We discuss some numerical aspects of our recently presented model which is capable of reproducing the main features of the phenomenon. Furthermore, we demonstrate how the model can be applied to understand variations in nominally identically stressed devices which have become important in the small area limit.
  • Keywords
    MOSFET; semiconductor device reliability; MOSFET; bias temperature instability; duty-factor; pMOS transistors; recovery; reliability; stressed devices; Degradation; Interface states; Laboratories; MOSFETs; Predictive models; Scalability; Stress; Temperature; Threshold voltage; Time measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Simulation of Semiconductor Processes and Devices, 2008. SISPAD 2008. International Conference on
  • Conference_Location
    Hakone
  • Print_ISBN
    978-1-4244-1753-7
  • Type

    conf

  • DOI
    10.1109/SISPAD.2008.4648238
  • Filename
    4648238