DocumentCode
3053224
Title
Modeling bias temperature instability during stress and recovery
Author
Grasser, Tibor ; Goes, Wolfgang ; Kaczer, Ben
Author_Institution
Christian Doppler Lab. for TCAD, Tech. Univ. Wien, Vienna
fYear
2008
fDate
9-11 Sept. 2008
Firstpage
65
Lastpage
68
Abstract
Bias temperature instability has attracted a lot of attention as a dominant degradation mechanism in modern MOS transistors. Despite considerable effort, the exact physics behind this mechanisms are still controversial. We discuss some numerical aspects of our recently presented model which is capable of reproducing the main features of the phenomenon. Furthermore, we demonstrate how the model can be applied to understand variations in nominally identically stressed devices which have become important in the small area limit.
Keywords
MOSFET; semiconductor device reliability; MOSFET; bias temperature instability; duty-factor; pMOS transistors; recovery; reliability; stressed devices; Degradation; Interface states; Laboratories; MOSFETs; Predictive models; Scalability; Stress; Temperature; Threshold voltage; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation of Semiconductor Processes and Devices, 2008. SISPAD 2008. International Conference on
Conference_Location
Hakone
Print_ISBN
978-1-4244-1753-7
Type
conf
DOI
10.1109/SISPAD.2008.4648238
Filename
4648238
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