THz time-domain spectroscopy study of grating couplers and segmented grating filters

Author

Garet, F. ; Coutaz, Jean-Louis ; Nazaro, M. ; Bonnet, E. ; Parriaux, O. ; Racine, G.

Author_Institution

Lab. of Microwaves & Characterization, Savoy Univ., Le Bourget du Lac, France

fYear

2004

fDate

27 Sept.-1 Oct. 2004

Firstpage

181

Lastpage

182

Abstract

THz waves can be used to test devices scaled in the millimeter range before manufacturing micron-sized optical devices. We demonstrate this concept by studying diffraction grating structures by THz time-domain spectroscopy. We show that 1D silicon grid gratings behave as narrow band high reflectivity mirror for focused THz beams.

Keywords

diffraction gratings; micromirrors; optical couplers; optical waveguide filters; silicon; submillimetre wave spectra; submillimetre waves; time-domain analysis; 1D silicon grid gratings; Si; THz beams; THz time domain spectroscopy; THz waves; diffraction grating structures; grating couplers; micron sized optical devices; narrow band high reflectivity mirror; segmented grating filters; Couplers; Gratings; Manufacturing; Millimeter wave devices; Optical devices; Optical diffraction; Optical filters; Spectroscopy; Testing; Time domain analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the 2004 Joint 29th International Conference on

Print_ISBN

0-7803-8490-3

Type

conf

DOI

10.1109/ICIMW.2004.1422014

Filename

1422014