DocumentCode
3054106
Title
Inter-layer grating coupler with metal mirrors for 3D optical interconnects
Author
JoonHyun Kang ; Atsumi, Yuki ; Sifer, Takeshi ; Hayashi, Yasuhiro ; Amemiya, Tomohiro ; Nishiyama, Naoto ; Arai, Shigehisa
Author_Institution
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
fYear
2013
fDate
June 30 2013-July 4 2013
Firstpage
1
Lastpage
2
Abstract
Inter-layer coupling between multilayer waveguides was demonstrated using a hydrogenated amorphous silicon (a-Si:H) grating couplers. The grating couplers consist of two vertically stacked waveguides sandwiched by metal mirrors. An enhancement of the coupling efficiency was observed by introducing metal mirrors.
Keywords
amorphous semiconductors; diffraction gratings; hydrogenation; mirrors; optical couplers; optical interconnections; optical multilayers; optical waveguides; silicon; 3D optical interconnects; Si:H; a-Si:H; coupling efficiency; hydrogenated amorphous silicon; interlayer grating coupler; metal mirrors; multilayer waveguides; vertically stacked waveguides; Couplers; Couplings; Gratings; Metals; Mirrors; Optical interconnections; Optical waveguides;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location
Kyoto
Type
conf
DOI
10.1109/CLEOPR.2013.6599990
Filename
6599990
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