Title :
Inter-layer grating coupler with metal mirrors for 3D optical interconnects
Author :
JoonHyun Kang ; Atsumi, Yuki ; Sifer, Takeshi ; Hayashi, Yasuhiro ; Amemiya, Tomohiro ; Nishiyama, Naoto ; Arai, Shigehisa
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
fDate :
June 30 2013-July 4 2013
Abstract :
Inter-layer coupling between multilayer waveguides was demonstrated using a hydrogenated amorphous silicon (a-Si:H) grating couplers. The grating couplers consist of two vertically stacked waveguides sandwiched by metal mirrors. An enhancement of the coupling efficiency was observed by introducing metal mirrors.
Keywords :
amorphous semiconductors; diffraction gratings; hydrogenation; mirrors; optical couplers; optical interconnections; optical multilayers; optical waveguides; silicon; 3D optical interconnects; Si:H; a-Si:H; coupling efficiency; hydrogenated amorphous silicon; interlayer grating coupler; metal mirrors; multilayer waveguides; vertically stacked waveguides; Couplers; Couplings; Gratings; Metals; Mirrors; Optical interconnections; Optical waveguides;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6599990
