• DocumentCode
    3054106
  • Title

    Inter-layer grating coupler with metal mirrors for 3D optical interconnects

  • Author

    JoonHyun Kang ; Atsumi, Yuki ; Sifer, Takeshi ; Hayashi, Yasuhiro ; Amemiya, Tomohiro ; Nishiyama, Naoto ; Arai, Shigehisa

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
  • fYear
    2013
  • fDate
    June 30 2013-July 4 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Inter-layer coupling between multilayer waveguides was demonstrated using a hydrogenated amorphous silicon (a-Si:H) grating couplers. The grating couplers consist of two vertically stacked waveguides sandwiched by metal mirrors. An enhancement of the coupling efficiency was observed by introducing metal mirrors.
  • Keywords
    amorphous semiconductors; diffraction gratings; hydrogenation; mirrors; optical couplers; optical interconnections; optical multilayers; optical waveguides; silicon; 3D optical interconnects; Si:H; a-Si:H; coupling efficiency; hydrogenated amorphous silicon; interlayer grating coupler; metal mirrors; multilayer waveguides; vertically stacked waveguides; Couplers; Couplings; Gratings; Metals; Mirrors; Optical interconnections; Optical waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
  • Conference_Location
    Kyoto
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2013.6599990
  • Filename
    6599990