DocumentCode
3054178
Title
Er silicate waveguides for on-chip optical amplifiers
Author
Isshiki, Hideo
Author_Institution
Dept. of Eng. Sci., Univ. of Electro-Commun. (UEC), Chofu, Japan
fYear
2013
fDate
June 30 2013-July 4 2013
Firstpage
1
Lastpage
2
Abstract
Er silicates waveguides for on-chip optical amplifiers are reviewed. The structure and the fabrication process are discussed. Directed self-assembly (DSA) process using radical assisted sputter (RAS) is promising method for the integration of Er silicates amplifier waveguide. Preliminary results on the gain property of the waveguide using Si photonic crystal slot are shown.
Keywords
erbium compounds; integrated optoelectronics; optical fabrication; optical waveguides; photonic crystals; reviews; self-assembly; yttrium compounds; DSA process; Er2SiO5; ErxY2-xSiO5; RAS; directed self-assembly process; erbium silicate amplifier waveguides; fabrication process; gain property; on-chip optical amplifiers; photonic crystal slot; radical assisted sputter; review; Erbium; Gain; Optical amplifiers; Optical fiber amplifiers; Photonics; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location
Kyoto
Type
conf
DOI
10.1109/CLEOPR.2013.6599994
Filename
6599994
Link To Document