• DocumentCode
    3054178
  • Title

    Er silicate waveguides for on-chip optical amplifiers

  • Author

    Isshiki, Hideo

  • Author_Institution
    Dept. of Eng. Sci., Univ. of Electro-Commun. (UEC), Chofu, Japan
  • fYear
    2013
  • fDate
    June 30 2013-July 4 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Er silicates waveguides for on-chip optical amplifiers are reviewed. The structure and the fabrication process are discussed. Directed self-assembly (DSA) process using radical assisted sputter (RAS) is promising method for the integration of Er silicates amplifier waveguide. Preliminary results on the gain property of the waveguide using Si photonic crystal slot are shown.
  • Keywords
    erbium compounds; integrated optoelectronics; optical fabrication; optical waveguides; photonic crystals; reviews; self-assembly; yttrium compounds; DSA process; Er2SiO5; ErxY2-xSiO5; RAS; directed self-assembly process; erbium silicate amplifier waveguides; fabrication process; gain property; on-chip optical amplifiers; photonic crystal slot; radical assisted sputter; review; Erbium; Gain; Optical amplifiers; Optical fiber amplifiers; Photonics; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
  • Conference_Location
    Kyoto
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2013.6599994
  • Filename
    6599994