Title :
Er silicate waveguides for on-chip optical amplifiers
Author_Institution :
Dept. of Eng. Sci., Univ. of Electro-Commun. (UEC), Chofu, Japan
fDate :
June 30 2013-July 4 2013
Abstract :
Er silicates waveguides for on-chip optical amplifiers are reviewed. The structure and the fabrication process are discussed. Directed self-assembly (DSA) process using radical assisted sputter (RAS) is promising method for the integration of Er silicates amplifier waveguide. Preliminary results on the gain property of the waveguide using Si photonic crystal slot are shown.
Keywords :
erbium compounds; integrated optoelectronics; optical fabrication; optical waveguides; photonic crystals; reviews; self-assembly; yttrium compounds; DSA process; Er2SiO5; ErxY2-xSiO5; RAS; directed self-assembly process; erbium silicate amplifier waveguides; fabrication process; gain property; on-chip optical amplifiers; photonic crystal slot; radical assisted sputter; review; Erbium; Gain; Optical amplifiers; Optical fiber amplifiers; Photonics; Silicon;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6599994
