Stiffness and Frequency Analysis of Microaccelerometer

This study used finite element analysis (FEA) to simulate and analyze the mechanical performance of the comb-finger type capacitive accelerometer. Structure modeling by using ANSYSreg8.1 is validated by the available data. The success of the model in predicting the stiffness constant and resonant frequency of the proof mass of accelerometer provides further encouragement in using the model to analyze the performance of the device for various combinations of geometry and different design in suspension beam. The suitability of different type suspension beam with different application in accelerometer is then suggested.