Title :
Reliability measurement of single axis capacitive accelerometers employing mechanical, thermal and acoustic stresses
Author :
Zaiyadi, Nazman ; -Yasin, Faisal Mohd ; Nagel, David J. ; Korman, Can E.
Author_Institution :
Fac. of Eng., Multimedia Univ., Cyberjaya, Malaysia
Abstract :
The purpose of this paper is to employ the QALT procedure on single axis accelerometers from Analog Device and Freescale. Laser-precision apparatus was designed, built, and employed to provide three types of excitations with great accuracy; mechanical (gravitational) test, thermal test and acoustical test. These tests are designed to mimic the operating conditions of the system, where the devices are employed.
Keywords :
accelerometers; microsensors; reliability; QALT procedure; acoustic stress; acoustical test; gravitational test; laser-precision apparatus; mechanical stress; reliability measurement; single axis accelerometers; single axis capacitive accelerometers; thermal stress; thermal test; Accelerometers; Acoustic devices; Acoustic measurements; Acoustic testing; Laser excitation; Mechanical variables measurement; Optical design; Stress measurement; System testing; Thermal stresses;
Conference_Titel :
Semiconductor Device Research Symposium, 2009. ISDRS '09. International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-6030-4
Electronic_ISBN :
978-1-4244-6031-1
DOI :
10.1109/ISDRS.2009.5378027
