Title :
Three dimensional functional microfluidic chips fabricated by hybrid femtosecond laser microfabrication
Author :
Dong Wu ; Si Zhu ; Jian Xu ; Sugioka, K. ; Midorikawa, Katsumi
Author_Institution :
Laser Technol. Lab., RIKEN- Adv. Sci. Inst., Wako, Japan
fDate :
June 30 2013-July 4 2013
Abstract :
We propose a novel strategy which fuses femtosecond laser TPP and FLAE to integrate 3D complex polymer microdevices into glass-based microfluidic devices for highly functional applications. 3D microfilters were fabricated, showing excellent filtering functions.
Keywords :
high-speed optical techniques; integrated optics; laser beam etching; micro-optomechanical devices; microfabrication; microfluidics; optical fabrication; optical filters; optical glass; optical polymers; polymerisation; two-photon processes; 3D complex polymer microdevices; 3D microfilters; FLAE; femtosecond laser TPP; femtosecond laser-assisted wet etching; filtering functions; glass-based microfluidic devices; hybrid femtosecond laser microfabrication; three-dimensional functional microfluidic chips; two-photon fabrication; Glass; Microchannel; Microfluidics; Optical filters; Polymers; Three-dimensional displays; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600018
