Title :
Effects of fluid media on ultra-thin SOI based pH sensors
Author :
Fernandes, P.G. ; Seitz, O. ; Chapman, R.A. ; Stiegler, H.J. ; Wen, H.-C. ; Chabal, Y.J. ; Vogel, E.M.
Author_Institution :
Dept. of Electr. Eng., Univ. of Texas at Dallas, Dallas, TX, USA
Abstract :
In this work, we explore other important factors including ionic response to applied voltages, salt contamination of oxides, bias dependence of signal drift and hysteresis in the presence of fluid.
Keywords :
chemical sensors; pH measurement; silicon-on-insulator; applied voltages; bias dependence; fluid media; hysteresis; ionic response; pH sensors; salt contamination; signal drift; ultra-thin SOI; Educational institutions; FETs; Gold; Hysteresis; Instruments; Materials science and technology; Microfluidics; Semiconductor device measurement; Silicon; Solvents;
Conference_Titel :
Semiconductor Device Research Symposium, 2009. ISDRS '09. International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-6030-4
Electronic_ISBN :
978-1-4244-6031-1
DOI :
10.1109/ISDRS.2009.5378055
