DocumentCode
3055213
Title
Probability of silicon fracture in molded packages [ICs]
Author
Bohm, Christina ; Hauck, Torsten ; Muller, Wolfgang H. ; Juritza, A.
Author_Institution
Motorola GmbH, Munchen, Germany
fYear
2004
fDate
2004
Firstpage
75
Lastpage
81
Abstract
The reliability of semiconductor devices in automotive environmental conditions requires optimized package design with respect to geometry, materials and manufacturing processes. Process steps at high temperatures can result in high package stresses at operating temperatures due to mismatch of thermal expansion coefficients of the package compound materials. Device failure may occur caused by failure modes, such as delamination of material interfaces or bulk material fracture. This paper addresses the predictability of silicon bulk fracture in microchips in electronic devices. The typical scatter of silicon strength data requires a probabilistic approach. Weibull theory is applied for the evaluation of the stress state and the computation of fracture probability in a microchip.
Keywords
Weibull distribution; elemental semiconductors; fracture; integrated circuit measurement; integrated circuit modelling; integrated circuit packaging; moulding; silicon; thermal expansion; thermal stress cracking; Si; Weibull theory; automotive environmental conditions; delamination failure modes; high temperature process steps; microchip bulk material fracture; molded packages; package compound materials; package design optimization; package stresses; semiconductor device reliability; silicon fracture probability; thermal expansion coefficients mismatch; Automotive engineering; Electronic packaging thermal management; Materials reliability; Semiconductor device packaging; Semiconductor device reliability; Semiconductor devices; Semiconductor materials; Silicon; Temperature; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the 5th International Conference on
Print_ISBN
0-7803-8420-2
Type
conf
DOI
10.1109/ESIME.2004.1304025
Filename
1304025
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