• DocumentCode
    3055320
  • Title

    Long range, high accuracy absolute distance measurement by improved three-wavelength heterodyne interferometry

  • Author

    Pei-Chi Huang ; Shang-Da Yang

  • Author_Institution
    Inst. of Photonics Technol., Nat. Tsing Hua Univ., Hsinchu, Taiwan
  • fYear
    2013
  • fDate
    June 30 2013-July 4 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The complexity and non-ambiguity range (NAR) of the conventional three-wavelength heterodyne interferometry are improved by using one phase modulator and a mapping procedure, respectively. Experiments demonstrated 10-mm NAR and an estimated accuracy of 0.65 nm.
  • Keywords
    distance measurement; light interferometry; optical modulation; phase modulation; absolute distance measurement; mapping procedure; nonambiguity range; phase modulator; three-wavelength heterodyne interferometry; Accuracy; Laser beams; Measurement by laser beam; Measurement errors; Optical interferometry; Phase measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
  • Conference_Location
    Kyoto
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2013.6600053
  • Filename
    6600053
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3055320