Title :
Long range, high accuracy absolute distance measurement by improved three-wavelength heterodyne interferometry
Author :
Pei-Chi Huang ; Shang-Da Yang
Author_Institution :
Inst. of Photonics Technol., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fDate :
June 30 2013-July 4 2013
Abstract :
The complexity and non-ambiguity range (NAR) of the conventional three-wavelength heterodyne interferometry are improved by using one phase modulator and a mapping procedure, respectively. Experiments demonstrated 10-mm NAR and an estimated accuracy of 0.65 nm.
Keywords :
distance measurement; light interferometry; optical modulation; phase modulation; absolute distance measurement; mapping procedure; nonambiguity range; phase modulator; three-wavelength heterodyne interferometry; Accuracy; Laser beams; Measurement by laser beam; Measurement errors; Optical interferometry; Phase measurement;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600053
