• DocumentCode
    3055695
  • Title

    Shear driven micro-flows of gaseous mixtures [MEMS]

  • Author

    Valougeorgis, D. ; Naris, S.

  • Author_Institution
    Dept. of Mech. & Ind. Eng., Univ. of Thessaly, Volos, Greece
  • fYear
    2004
  • fDate
    2004
  • Firstpage
    251
  • Lastpage
    256
  • Abstract
    A mesoscale kinetic-type approach is proposed to solve shear driven micro flows of binary gas mixtures in MEMS. The coupled linear integral-differential equations, which formally describe the flow, are solved using the discrete velocity method. The complicated collision integral term is approximated by the McCormack model. The proposed approach is applied in one and two dimensions, solving the Couette and the driven cavity problems respectively, for two binary gas mixtures (Ne-Ar and He-Xe). Numerical results are presented for a wide range of rarefaction and for various molar concentrations. It is demonstrated that the formulation is very efficient and can be implemented as an alternative to classical approaches, such as Navier Stokes solvers with slip boundary conditions.
  • Keywords
    Couette flow; argon; gas mixtures; helium; integro-differential equations; microfluidics; neon; rarefied fluid dynamics; shear flow; xenon; Couette problem; He-Xe; MEMS; McCormack model; Navier Stokes solvers; Ne-Ar; binary gaseous mixtures; collision integral term approximation; coupled linear integral-differential equations; discrete velocity method; driven cavity problem; mesoscale kinetic-type method; molar concentrations; rarefaction; shear driven micro-flows; slip boundary conditions; Argon; Boltzmann equation; Boundary conditions; Industrial engineering; Integral equations; Kinetic theory; Microelectromechanical devices; Micromechanical devices; Physics; Viscosity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the 5th International Conference on
  • Print_ISBN
    0-7803-8420-2
  • Type

    conf

  • DOI
    10.1109/ESIME.2004.1304047
  • Filename
    1304047