Monolithic Microwave IC Technologies and System Applications

Recent progress of GaAs Monolithic Microwave Integrated Circuit (MMIC) and Gb/s logic has established a solid foundation for many future system applications. Systems benefiting from these advances include phased/adaptive arrays, MILSATCOM, Television Receive-Only (TVRO) receiver, Electronic Warfare (EW), instrumentation and radar. This paper presents various MMIC technologies and tradeoffs of materials (crystal growths, orientations, material properties, characterization techniques, etc.), processes (ion-implantation, Molecular Beam Epitaxy, Vapor Phase Epitaxy, Liquid Phase Epitaxy), and circuit fabrication via hole, air bridge, active matching, etc. The performance of the presently achieved SHF/EHF MMIC´s are summarized. Technical problems, possible solutions, and future trends of MMIC design and fabrication (impedance matching methods, bias, low noise techniques, medium power IC´s, EHF circuits, filters, isolators, packaging techniques, etc.) are also described.