DocumentCode
3055795
Title
Design and analysis of novel glass WLCSP structure
Author
Yuan, Chang-Ann ; Han, Cheng Nan ; Chiang, Kou-Ning
Author_Institution
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear
2004
fDate
2004
Firstpage
279
Lastpage
285
Abstract
A novel glass wafer level chip scaled packaging (WLCSP) structure is proposed herein to resolve the challenge faced by packaging houses to modify their mass-production packaging equipment from an 8" wafer process to a 12" one, due to the increasing demand of the semiconductor manufacturers\´ 12" wafer process. The finite element method and parametric analysis are applied to obtain a robust design parameter for the proposed glass WLCSP structure. This novel packaging structure comprises a chip that is first diced from the 12" wafer and is attached to 8" glass. Then the conventional 8" WLCSP process can be accomplished on this 8" glass. After the validation of the solder joint stand-off height, a finite element model is conducted to elucidate the reliability issues of the proposed glass WLCSP. The simulation results show that the robust design parameters could enhance the reliability of the proposed glass WLCSP structure by about 3.5 times, compared to the original design parameters.
Keywords
chip scale packaging; finite element analysis; flip-chip devices; glass; integrated circuit reliability; 12 inch; 8 inch; WLCSP reliability; chip dicing; finite element method; flip chip assembly; glass WLCSP structure; glass attached chip; mass-production packaging equipment; parametric analysis; solder fatigue prediction; solder joint stand-off height; wafer level chip scaled packaging; Chip scale packaging; Finite element methods; Glass manufacturing; Manufacturing processes; Packaging machines; Robustness; Semiconductor device manufacture; Semiconductor device packaging; Soldering; Wafer scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the 5th International Conference on
Print_ISBN
0-7803-8420-2
Type
conf
DOI
10.1109/ESIME.2004.1304051
Filename
1304051
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