• DocumentCode
    3055795
  • Title

    Design and analysis of novel glass WLCSP structure

  • Author

    Yuan, Chang-Ann ; Han, Cheng Nan ; Chiang, Kou-Ning

  • Author_Institution
    Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
  • fYear
    2004
  • fDate
    2004
  • Firstpage
    279
  • Lastpage
    285
  • Abstract
    A novel glass wafer level chip scaled packaging (WLCSP) structure is proposed herein to resolve the challenge faced by packaging houses to modify their mass-production packaging equipment from an 8" wafer process to a 12" one, due to the increasing demand of the semiconductor manufacturers\´ 12" wafer process. The finite element method and parametric analysis are applied to obtain a robust design parameter for the proposed glass WLCSP structure. This novel packaging structure comprises a chip that is first diced from the 12" wafer and is attached to 8" glass. Then the conventional 8" WLCSP process can be accomplished on this 8" glass. After the validation of the solder joint stand-off height, a finite element model is conducted to elucidate the reliability issues of the proposed glass WLCSP. The simulation results show that the robust design parameters could enhance the reliability of the proposed glass WLCSP structure by about 3.5 times, compared to the original design parameters.
  • Keywords
    chip scale packaging; finite element analysis; flip-chip devices; glass; integrated circuit reliability; 12 inch; 8 inch; WLCSP reliability; chip dicing; finite element method; flip chip assembly; glass WLCSP structure; glass attached chip; mass-production packaging equipment; parametric analysis; solder fatigue prediction; solder joint stand-off height; wafer level chip scaled packaging; Chip scale packaging; Finite element methods; Glass manufacturing; Manufacturing processes; Packaging machines; Robustness; Semiconductor device manufacture; Semiconductor device packaging; Soldering; Wafer scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the 5th International Conference on
  • Print_ISBN
    0-7803-8420-2
  • Type

    conf

  • DOI
    10.1109/ESIME.2004.1304051
  • Filename
    1304051