DocumentCode
3057067
Title
High performance IGZO TFTs on steel: Device stability and circuit integration
Author
Khan, Shahrukh A. ; Hatalis, Miltiadis
Author_Institution
Display Res. Lab., Lehigh Univ., Bethlehem, PA, USA
fYear
2009
fDate
9-11 Dec. 2009
Firstpage
1
Lastpage
2
Abstract
Oxide-semiconductor based thin-film transistors (TFTs) have advanced tremendously off-late and provides an attractive alternative to silicon-based TFTs. They are usually wide-gap materials, transparent in the visible spectrum and thus render possible ubiquitous transparent electronics. Furthermore, large carrier mobilities in the amorphous phase is achievable due to high degree of localization and suggests that if the carrier concentration can be controlled, the properties of amorphous oxides are quite suitable for TFT applications. In this present study, we present room temperature fabrication and characterization of amorphous IGZO (Indium Gallium Zinc Oxide) based TFTs. Although numerous reports exist about IGZO TFTs, there is few that report high performance device characteristic without the need of post fabrication processes.
Keywords
carrier mobility; gallium compounds; indium compounds; semiconductor device manufacture; steel; thin film transistors; wide band gap semiconductors; zinc compounds; InGaZnO4; amorphous IGZO based TFT; amorphous oxides; amorphous phase; carrier concentration; carrier mobilities; circuit integration; device stability; oxide-semiconductor based thin-film transistors; room temperature fabrication; steel; ubiquitous transparent electronics; visible spectrum; wide-gap materials; Amorphous materials; Circuit stability; Dielectric substrates; Displays; Educational institutions; Fabrication; Steel; Stress; Temperature; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2009. ISDRS '09. International
Conference_Location
College Park, MD
Print_ISBN
978-1-4244-6030-4
Electronic_ISBN
978-1-4244-6031-1
Type
conf
DOI
10.1109/ISDRS.2009.5378154
Filename
5378154
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