DocumentCode
3057307
Title
Micro field in MEMS actuators
Author
Cui, T.H. ; Zhou, Z.Y.
Author_Institution
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China
fYear
1996
fDate
2-4 Oct 1996
Firstpage
105
Lastpage
109
Abstract
Micro field is a new basic concept which can be used to analyze the actuation mechanism of MEMS (Micro Electro Mechanical Systems) actuators. First, the basic concept of micro field and fundamental principle of micro extended Rayleigh wave field have been put forward. Then, the micro field has been used to analyze the intrinsic quality of two kinds of microactuators, which include a piezoelectric micropump and a piezoelectric micromotor as typical examples. Finally, a new kind of piezoelectric micromotor model has been fabricated to carry out experiments
Keywords
microactuators; micromotors; micropumps; piezoelectric actuators; MEMS actuators; actuation mechanism; micro extended Rayleigh wave field; micro field; microactuators; piezoelectric micromotor; piezoelectric micropump; Actuators; Electrostatics; Instruments; Magnetic fields; Mechanical systems; Microactuators; Micromechanical devices; Micromotors; Micropumps; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Machine and Human Science, 1996., Proceedings of the Seventh International Symposium
Conference_Location
Nagoya
Print_ISBN
0-7803-3596-1
Type
conf
DOI
10.1109/MHS.1996.563409
Filename
563409
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