DocumentCode
3057553
Title
Advanced in Gallium Nitride materials and structures for power electronics
Author
Johnson, Mark A L ; Barlage, Doug W.
Author_Institution
Mater. Sci. & Eng., NC State Univ., Raleigh, NC, USA
fYear
2009
fDate
9-11 Dec. 2009
Firstpage
1
Lastpage
2
Abstract
The goal of this work is to achieve semiconductor power devices capable of efficiently switching the loads for electric power distribution systems. In order to assess the potential benefit of GaN and related III-N structures in power electronic applications, the relevant physical properties of heteroepitaxial GaN and bulk GaN were compared. Properties were taken from the literature for heteroepitaxial GaN as metal-organic chemical vapor (MOCVD) deposited layers up to 2 ¿m thick on dissimilar substrates, with a typical defect density higher than 109/cm2. Similarly, properties for bulk GaN layers are for low defect GaN, with a density less than 107/cm2. Recent results on dislocation defect reduction for bulk GaN was reviewed as well as initial power device demonstrations. In addition, the parallel challenges of high conductivity, low defect density GaN substrates were addressed to minimize series resistance of switching and rectifying devices. It was found that thermal conductivity and critical breakdown field are the two significant areas where device relevant physical properties are significantly improved for GaN relative to traditionally cited values.
Keywords
III-V semiconductors; MOCVD coatings; dislocation density; electric breakdown; electric resistance; gallium compounds; power semiconductor devices; reviews; semiconductor epitaxial layers; substrates; thermal conductivity; wide band gap semiconductors; GaN; III-N structures; MOCVD; bulk gallium nitride; critical breakdown field; device relevant physical properties; dislocation defect density; dissimilar substrates; electric power distribution systems; gallium nitride substrates; heteroepitaxial gallium nitride layers; load switching; metal-organic chemical vapor deposited layers; power electronics; rectifying devices; review; semiconductor power devices; series resistance; size 2 mum; switching devices; thermal conductivity; Chemicals; Electric breakdown; Gallium nitride; III-V semiconductor materials; MOCVD; Power electronics; Power semiconductor switches; Semiconductor materials; Substrates; Thermal conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2009. ISDRS '09. International
Conference_Location
College Park, MD
Print_ISBN
978-1-4244-6030-4
Electronic_ISBN
978-1-4244-6031-1
Type
conf
DOI
10.1109/ISDRS.2009.5378172
Filename
5378172
Link To Document