Title :
Femtosecond laser processing of active and passive devices for bio-MEMS
Author_Institution :
Mech. Eng. Dept., Eindhoven Univ. of Technol., Eindhoven, Netherlands
fDate :
June 30 2013-July 4 2013
Abstract :
Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro-Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.
Keywords :
bioMEMS; biological techniques; high-speed optical techniques; integrated optics; laser materials processing; micro-optomechanical devices; microfabrication; optical fabrication; optical glass; optical waveguides; active devices; bioMEMS; biomicroelectromechanical systems; femtosecond laser processing; glass; microchannels; monolithic integration; passive devices; waveguides; Materials; Optical device fabrication; Optical pulses; Optical waveguides; Silicon compounds; Ultrafast optics; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600168
