• DocumentCode
    3057947
  • Title

    Fabrication of functional micro- and nanofluidics embedded in glass using femtosecond laser microprocessing

  • Author

    Cheng, Yuan Bing ; Liao, Yifan ; Sugioka, K.

  • Author_Institution
    State Key Lab. of High Field Laser Phys., Shanghai, China
  • fYear
    2013
  • fDate
    June 30 2013-July 4 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We resolve long-standing difficulties in fabrication of large-scale 3D microfluidics and demonstrate fabrication of nanochannels of a width of ~40 nm (~1/20 of writing beam wavelength) in glass with femtosecond laser pulses.
  • Keywords
    high-speed optical techniques; laser materials processing; micro-optomechanical devices; microfabrication; microfluidics; nanofabrication; nanofluidics; nanophotonics; optical fabrication; optical glass; SiO2; femtosecond laser microprocessing; femtosecond laser pulses; functional microfluidics; functional nanofluidics; glass; large-scale 3D microfluidics; nanochannels; size 40 nm; writing beam wavelength; Fabrication; Glass; Laser beams; Microfluidics; Nanofluidics; Three-dimensional displays; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
  • Conference_Location
    Kyoto
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2013.6600169
  • Filename
    6600169
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3057947