Title :
Fabrication of functional micro- and nanofluidics embedded in glass using femtosecond laser microprocessing
Author :
Cheng, Yuan Bing ; Liao, Yifan ; Sugioka, K.
Author_Institution :
State Key Lab. of High Field Laser Phys., Shanghai, China
fDate :
June 30 2013-July 4 2013
Abstract :
We resolve long-standing difficulties in fabrication of large-scale 3D microfluidics and demonstrate fabrication of nanochannels of a width of ~40 nm (~1/20 of writing beam wavelength) in glass with femtosecond laser pulses.
Keywords :
high-speed optical techniques; laser materials processing; micro-optomechanical devices; microfabrication; microfluidics; nanofabrication; nanofluidics; nanophotonics; optical fabrication; optical glass; SiO2; femtosecond laser microprocessing; femtosecond laser pulses; functional microfluidics; functional nanofluidics; glass; large-scale 3D microfluidics; nanochannels; size 40 nm; writing beam wavelength; Fabrication; Glass; Laser beams; Microfluidics; Nanofluidics; Three-dimensional displays; Writing;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600169
