Development of microfabricated traveling wave tubes

Author

Ives, Lawrence ; Kory, Carol ; Read, Mike ; Miram, George ; Booske, John

Author_Institution

Calabazas Creek Res. Inc., Saratoga, CA, USA

fYear

2004

fDate

27 Sept.-1 Oct. 2004

Firstpage

523

Lastpage

524

Abstract

Advances in manufacturing techniques for small structures are facilitating the development of high frequency electron devices. Lithographic techniques, similar to those used by the semiconductor industry, are allowing construction of components with micron-size features, including mode converters, RF windows, field emission array cathodes, and RF circuits. This presentation describes the application of this technology to the development of high frequency traveling wave tubes for high data rate communications.

Keywords

field emitter arrays; lithography; microwave circuits; travelling wave tubes; RF circuits; RF windows; field emission array cathodes; high data rate communications; high frequency electron devices; lithographic techniques; manufacturing techniques; micron size features; mode converters; semiconductor industry; traveling wave tube microfabrication; Assembly; Cathodes; Circuits; Conductors; Current density; Electron beams; Electron devices; Laboratories; Machining; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the 2004 Joint 29th International Conference on

Print_ISBN

0-7803-8490-3

Type

conf

DOI

10.1109/ICIMW.2004.1422194

Filename

1422194