Title :
Deep micromachining of poly-ethylene terephthalate for plastic MEMS applications
Author :
Pajouhi, H. ; Mohajerzadeh, S. ; Nayeri, F. ; Parsinejad, F. ; Sanaee, Z.
Author_Institution :
Nano Electron. & Thin Film Lab., Univ. of Tehran, Tehran, Iran
Abstract :
This work demonstrates deep etching of poly-ethylene terephthalate (PET) substrates for plastic MEMS applications. Complex features such as flexible crack free spiral and serpentine structures are realized. As an application for this etching technique, micromachining of a deformation sensor and micromechanical pump with fully suspended cantilevers are presented.
Keywords :
cantilevers; deformation; etching; flexible structures; micromachining; micropumps; microsensors; plastics; polymer films; PET substrates; deep etching; deep micromachining; deformation sensor; flexible structures; micromechanical pump; plastic MEMS applications; polyethylene terephthalate; serpentine structures; spiral structures; suspended cantilevers; Etching; Micromachining; Micromechanical devices; Plastics; Positron emission tomography; Rubber; Silicon; Spirals; Substrates; Tin;
Conference_Titel :
Semiconductor Device Research Symposium, 2009. ISDRS '09. International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-6030-4
Electronic_ISBN :
978-1-4244-6031-1
DOI :
10.1109/ISDRS.2009.5378266
