Title :
Germanium PIN detector on silicon grown by Sb surfactant-assisted epitaxy
Author :
Davidson, Anthony L., III ; Thompson, Phillip E. ; Worchesky, Terrance ; Twigg, Mark E.
Author_Institution :
Naval Res. Lab., Washington, DC, USA
Abstract :
In the current work, Ge PIN diodes were fabricated on Ge VS on Si substrates using Sb surfactant-assisted growth. Previous studies have shown this method minimizes the threading dislocations and results in a smooth surface. A potential concern is the unintentional doping by the Sb surfactant that continues to segregate. In the PIN devices this may be acceptable since the residual doping can be used as the n electrical contacts or used as a technique to electrically isolate the p contact from the substrate.
Keywords :
antimony; elemental semiconductors; germanium; p-i-n diodes; semiconductor doping; silicon; Ge; PIN detector; PIN diodes; Sb; Si; electrical contacts; residual doping; surfactant-assisted epitaxy; surfactant-assisted growth; threading dislocations; Buffer layers; Dark current; Detectors; Diodes; Educational institutions; Epitaxial growth; Germanium; Silicon; Substrates; Temperature;
Conference_Titel :
Semiconductor Device Research Symposium, 2009. ISDRS '09. International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-6030-4
Electronic_ISBN :
978-1-4244-6031-1
DOI :
10.1109/ISDRS.2009.5378280