Title :
Quantum transport in patterned graphene nanoribbons
Author :
Lian, Chuanxin ; Tahy, Kristof ; Fang, Tian ; Li, Guowang ; Xing, Huili Grace ; Jena, Debdeep
Author_Institution :
Electr. Eng. Dept., Univ. of Notre Dame, Notre Dame, IN, USA
Abstract :
The paper presents the fabrication of graphene nanoribbons (GNR) on exfoliated graphene flakes on SiO2/Si. The Si substrate is heavily doped n-type. Al metal masks were patterned by electron beam lithography and electron beam deposition. The exposed graphene was removed by O2 plasma etching and then the metal masks were removed by Al etchant. Quantized conductance was observed in the thin GNRs which form quasi-1D transport systems due to the carrier constriction by the ribbon edge boundaries. Landauer´s formula was applied to fit the experimental data and excellent agreement was achieved.
Keywords :
carrier mobility; electron beam deposition; electron beam lithography; graphene; nanolithography; nanopatterning; silicon compounds; sputter etching; Landauer formula; SiO2-Si; electron beam deposition; electron beam lithography; exfoliated graphene flakes; metal masks; patterned graphene nanoribbons; plasma etching; quantized conductance; quantum transport; Electron beams; Etching; Fabrication; Lithography; Plasma applications; Plasma transport processes;
Conference_Titel :
Semiconductor Device Research Symposium, 2009. ISDRS '09. International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-6030-4
Electronic_ISBN :
978-1-4244-6031-1
DOI :
10.1109/ISDRS.2009.5378286