• DocumentCode
    3060093
  • Title

    Development of MEMS electric split-ring resonator arrays as tunable THz filters

  • Author

    Fusheng Ma ; You Qian ; Yu-Sheng Lin ; Hongwei Liu ; Xinhai Zhang ; Chengkuo Lee

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
  • fYear
    2013
  • fDate
    June 30 2013-July 4 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Structurally reconfigurable metamaterials showing terahertz frequency tunability are presented, which employ deformable microelectromechanical curved cantilevers for tuning the resonance frequency of the electric split-ring resonators. The observed tunability can be applied in tunable metamaterial devices.
  • Keywords
    cantilevers; micro-optomechanical devices; micromechanical resonators; microwave photonics; optical filters; optical metamaterials; optical resonators; optical tuning; MEMS electric split-ring resonator arrays; deformable microelectromechanical curved cantilevers; resonance frequency tuning; structurally reconfigurable metamaterials; terahertz frequency tunability; tunable THz filters; Arrays; Measurement by laser beam; Metamaterials; Micromechanical devices; Resonant frequency; Structural beams; Time-domain analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
  • Conference_Location
    Kyoto
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2013.6600258
  • Filename
    6600258