• DocumentCode
    3060255
  • Title

    Ultraviolet-induced wavelength trimming of BCB-buried athermal Si slot wavelength filters

  • Author

    Atsumi, Yuki ; Sifer, Takeshi ; JoonHyun Kang ; Hayashi, Yasuhiro ; Nishiyama, Naoto ; Arai, Shigehisa

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
  • fYear
    2013
  • fDate
    June 30 2013-July 4 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Wavelength trimming for athermal Si slot wavelength filter embedded with BCB using DUV exposure was demonstrated. The total shift of 1.21 nm was obtained after exposing 14 J/cm2 of DUV light without any degradation in athermal and propagation characteristics.
  • Keywords
    elemental semiconductors; light propagation; optical filters; organic compounds; silicon; BCB-buried athermal slot wavelength filters; DUV exposure; DUV light; Si; benzocyclobutene; propagation characteristics; ultraviolet-induced wavelength trimming; Optical filters; Optical refraction; Optical ring resonators; Optical variables control; Optical waveguides; Resonator filters; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
  • Conference_Location
    Kyoto
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2013.6600264
  • Filename
    6600264
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3060255